41.
Benevides, Rodrigo S
Optomechanics in photonic crystal cavities Masters Thesis
Campinas, 2016.
@mastersthesis{Benevides:2016uw,
title = {Optomechanics in photonic crystal cavities},
author = {Rodrigo S Benevides},
year = {2016},
date = {2016-01-01},
address = {Campinas},
abstract = {The field of cavity optomechanics has experienced a rapid growth in last decade. The increasing interest in this area was mostly driven by the intricate interface between mechanical motion and the optical field. Such coupling is widely explored in a variety of experiments scaling from kilometer long interferometers to micrometer optical cavities. The challenge on all these experiments is to create an optomechanical device with long-living optical and mechanical resonances while keeping a large coupling rate. In this context photonic crystal cavities have emerged as a strong candidate since they are able to produce very small optical mode volume and long optical lifetime. In the classical regime, these tiny devices, which can mechanically oscillate from frequencies ranging from couple MHz up to tens of GHz, allows for highly sensitive small forces, masses, displacements and acceleration detectors. They are also used to produce high quality optically driven mechanical oscillators which can be synchronized via an optical field. In the quantum regime, cavity quantum optomechanics is being used to understand decoherence phenomena in a mesoscopic scale by creating nonclassical states between light and mechanical modes intermediated by optomechanical interaction. However up to now, few studies have been done concerning the possibility of large scale production of these devices, a necessary step towards massive technological and scientific application of these devices.
In this work, we describe a detailed study of optomechanical cavities based upon photonic crystal cavities fabricated in a CMOS-compatible commercial foundry. We prove the feasibil- ity of this platform exploring three photonic crystal designs. First, we show how to achieve ultra-high optical quality factors using a design resilient to the fabrication constrains. Our demonstrated quality factors are the largest ever reported using photonic crystal cavities man- ufactured by optical lithography. Secondly, we investigate a slot type optical cavity, able to produce very large optomechanical coupling using a simple in-plane motion. Finally, we design a trimmable acoustic shield to restrict the mechanical motion inside the optical region. Such strategy was successfully used to produce high mechanical quality factor and optomechanical coupling which enabled the observation of cooling and amplification of mechanical modes at low temperature.},
keywords = {},
pubstate = {published},
tppubtype = {mastersthesis}
}
The field of cavity optomechanics has experienced a rapid growth in last decade. The increasing interest in this area was mostly driven by the intricate interface between mechanical motion and the optical field. Such coupling is widely explored in a variety of experiments scaling from kilometer long interferometers to micrometer optical cavities. The challenge on all these experiments is to create an optomechanical device with long-living optical and mechanical resonances while keeping a large coupling rate. In this context photonic crystal cavities have emerged as a strong candidate since they are able to produce very small optical mode volume and long optical lifetime. In the classical regime, these tiny devices, which can mechanically oscillate from frequencies ranging from couple MHz up to tens of GHz, allows for highly sensitive small forces, masses, displacements and acceleration detectors. They are also used to produce high quality optically driven mechanical oscillators which can be synchronized via an optical field. In the quantum regime, cavity quantum optomechanics is being used to understand decoherence phenomena in a mesoscopic scale by creating nonclassical states between light and mechanical modes intermediated by optomechanical interaction. However up to now, few studies have been done concerning the possibility of large scale production of these devices, a necessary step towards massive technological and scientific application of these devices.
In this work, we describe a detailed study of optomechanical cavities based upon photonic crystal cavities fabricated in a CMOS-compatible commercial foundry. We prove the feasibil- ity of this platform exploring three photonic crystal designs. First, we show how to achieve ultra-high optical quality factors using a design resilient to the fabrication constrains. Our demonstrated quality factors are the largest ever reported using photonic crystal cavities man- ufactured by optical lithography. Secondly, we investigate a slot type optical cavity, able to produce very large optomechanical coupling using a simple in-plane motion. Finally, we design a trimmable acoustic shield to restrict the mechanical motion inside the optical region. Such strategy was successfully used to produce high mechanical quality factor and optomechanical coupling which enabled the observation of cooling and amplification of mechanical modes at low temperature.
In this work, we describe a detailed study of optomechanical cavities based upon photonic crystal cavities fabricated in a CMOS-compatible commercial foundry. We prove the feasibil- ity of this platform exploring three photonic crystal designs. First, we show how to achieve ultra-high optical quality factors using a design resilient to the fabrication constrains. Our demonstrated quality factors are the largest ever reported using photonic crystal cavities man- ufactured by optical lithography. Secondly, we investigate a slot type optical cavity, able to produce very large optomechanical coupling using a simple in-plane motion. Finally, we design a trimmable acoustic shield to restrict the mechanical motion inside the optical region. Such strategy was successfully used to produce high mechanical quality factor and optomechanical coupling which enabled the observation of cooling and amplification of mechanical modes at low temperature.
42.
Souza, Mario C. M. M.; Rezende, Guilherme F. M.; Barea, Luis A. M.; von Zuben, Antonio A. G.; Wiederhecker, Gustavo S.; Frateschi, Newton C.
Spectral engineering with coupled microcavities: active control of resonant mode-splitting Journal Article
In: Opt. Lett., vol. 40, no. 14, pp. 3332–3335, 2015.
@article{Souza:15,
title = {Spectral engineering with coupled microcavities: active control of resonant mode-splitting},
author = {Mario C. M. M. Souza and Guilherme F. M. Rezende and Luis A. M. Barea and Antonio A. G. von Zuben and Gustavo S. Wiederhecker and Newton C. Frateschi},
url = {http://ol.osa.org/abstract.cfm?URI=ol-40-14-3332},
doi = {10.1364/OL.40.003332},
year = {2015},
date = {2015-07-01},
journal = {Opt. Lett.},
volume = {40},
number = {14},
pages = {3332--3335},
publisher = {OSA},
abstract = {Optical mode-splitting is an efficient tool to shape and fine-tune the spectral response of resonant nanophotonic devices. The active control of mode-splitting, however, is either small or accompanied by undesired resonance-shifts, often much larger than the resonance splitting. We report a control mechanism that enables reconfigurable and widely tunable mode splitting while efficiently mitigating undesired resonance shifts. This is achieved by actively controlling the excitation of counter-traveling modes in coupled resonators. The transition from a large splitting (80 GHz) to a single-notch resonance is demonstrated using low-power microheaters (35 mW). We show that the spurious resonance shift in our device is only limited by thermal crosstalk, and resonance-shift-free splitting control may be achieved.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Optical mode-splitting is an efficient tool to shape and fine-tune the spectral response of resonant nanophotonic devices. The active control of mode-splitting, however, is either small or accompanied by undesired resonance-shifts, often much larger than the resonance splitting. We report a control mechanism that enables reconfigurable and widely tunable mode splitting while efficiently mitigating undesired resonance shifts. This is achieved by actively controlling the excitation of counter-traveling modes in coupled resonators. The transition from a large splitting (80 GHz) to a single-notch resonance is demonstrated using low-power microheaters (35 mW). We show that the spurious resonance shift in our device is only limited by thermal crosstalk, and resonance-shift-free splitting control may be achieved.
43.
Souza, Mario C.; Barea, Luis A.; Wiederhecker, Gustavo; von Zuben, Antonio A.; Frateschi, Newton C.
Tunable Spectral Engineering of Coupled Silicon Microcavities Proceedings Article
In: CLEO: 2015, pp. JTu5A.49, Optical Society of America, 2015.
@inproceedings{Souza:2015aa,
title = {Tunable Spectral Engineering of Coupled Silicon Microcavities},
author = {Mario C. Souza and Luis A. Barea and Gustavo Wiederhecker and Antonio A. von Zuben and Newton C. Frateschi},
url = {http://www.osapublishing.org/abstract.cfm?URI=CLEO_QELS-2015-JTu5A.49},
year = {2015},
date = {2015-01-01},
booktitle = {CLEO: 2015},
journal = {CLEO: 2015},
pages = {JTu5A.49},
publisher = {Optical Society of America},
abstract = {We demonstrate the generation and control of optical resonance mode-splitting arising from a single-notch resonances using coupled silicon microring resonators with electrically controlled counter-propagating mode excitation.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
We demonstrate the generation and control of optical resonance mode-splitting arising from a single-notch resonances using coupled silicon microring resonators with electrically controlled counter-propagating mode excitation.
44.
Benevides, Rodrigo; Luiz, Gustavo O.; Santos, Felipe G.; Wiederhecker, Gustavo S.; Alegre, Thiago
Optomechanical Crystals Fabricated by a CMOS Foundry Proceedings Article
In: Frontiers in Optics 2015, pp. FTu5C.3, Optical Society of America, 2015.
@inproceedings{Benevides:15,
title = {Optomechanical Crystals Fabricated by a CMOS Foundry},
author = {Rodrigo Benevides and Gustavo O. Luiz and Felipe G. Santos and Gustavo S. Wiederhecker and Thiago Alegre},
url = {http://www.osapublishing.org/abstract.cfm?URI=FiO-2015-FTu5C.3},
doi = {10.1364/FIO.2015.FTu5C.3},
year = {2015},
date = {2015-01-01},
booktitle = {Frontiers in Optics 2015},
journal = {Frontiers in Optics 2015},
pages = {FTu5C.3},
publisher = {Optical Society of America},
abstract = {Photonics crystal optomechanical cavities fabricated on a commercial CMOS-compatible foundry are demonstrated. Despite the limited foundry design rules we could achieve a ultra-high Q (9.1texttimes105) photonic crystals and optomechanical crystal cavities with large coupling rate (g 0$=$60 KHz).},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Photonics crystal optomechanical cavities fabricated on a commercial CMOS-compatible foundry are demonstrated. Despite the limited foundry design rules we could achieve a ultra-high Q (9.1texttimes105) photonic crystals and optomechanical crystal cavities with large coupling rate (g 0$=$60 KHz).
45.
Barea, Luis A; von Zuben, Antonio A; M-Brahim, Tayeb; Montagnoli, Arlindo N; Hospital, Michel; Frateschi, N; Cirino, Giuseppe A
Fresnel Zone Plate Array Fabricated by Maskless Lithography Proceedings Article
In: 2015 30TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO), Univ Fed Bahia; PET Engn Electrica; Sociedade Brasileira Computacao; Sociedade Brasileira Microelectronica; IEEE Solid State Circuits Soc; IEEE Elect Devices Soc; IFIP; CAPES; CNPq; SENAI CIMATEC IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2015, ISBN: 978-1-4673-7162-9, (30th Symposium on Microelectronics Technology and Devices (SBMicro), Salvador, BRAZIL, AUG 31-SEP 04, 2015).
@inproceedings{ISI:000378423000052,
title = {Fresnel Zone Plate Array Fabricated by Maskless Lithography},
author = {Luis A Barea and Antonio A von Zuben and Tayeb M-Brahim and Arlindo N Montagnoli and Michel Hospital and N Frateschi and Giuseppe A Cirino},
isbn = {978-1-4673-7162-9},
year = {2015},
date = {2015-01-01},
booktitle = {2015 30TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO)},
publisher = {IEEE},
address = {345 E 47TH ST, NEW YORK, NY 10017 USA},
organization = {Univ Fed Bahia; PET Engn Electrica; Sociedade Brasileira Computacao;
Sociedade Brasileira Microelectronica; IEEE Solid State Circuits Soc;
IEEE Elect Devices Soc; IFIP; CAPES; CNPq; SENAI CIMATEC},
abstract = {This work reports the fabrication of Fresnel Zone Plates (FZP) by
employing a maskless lithography tool based on direct laser writing. The
target application areas in this work are to use a micro lens array
(MLA) in a wavefront sensor, for optical aberrations quantification in
human eye diagnostics or adaptive optical system. This last one is
essential in astronomy applications in order to correct the aberrations
introduced by earth atmosphere. The fabricated FZP generates
illumination points with high contrast intensity in the focal plane,
which is the purpose of the wavefront sensor. This high-contrast image
suggests that the employed fabrication process is well controlled and it
matches the design parameters.},
note = {30th Symposium on Microelectronics Technology and Devices (SBMicro),
Salvador, BRAZIL, AUG 31-SEP 04, 2015},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This work reports the fabrication of Fresnel Zone Plates (FZP) by
employing a maskless lithography tool based on direct laser writing. The
target application areas in this work are to use a micro lens array
(MLA) in a wavefront sensor, for optical aberrations quantification in
human eye diagnostics or adaptive optical system. This last one is
essential in astronomy applications in order to correct the aberrations
introduced by earth atmosphere. The fabricated FZP generates
illumination points with high contrast intensity in the focal plane,
which is the purpose of the wavefront sensor. This high-contrast image
suggests that the employed fabrication process is well controlled and it
matches the design parameters.
employing a maskless lithography tool based on direct laser writing. The
target application areas in this work are to use a micro lens array
(MLA) in a wavefront sensor, for optical aberrations quantification in
human eye diagnostics or adaptive optical system. This last one is
essential in astronomy applications in order to correct the aberrations
introduced by earth atmosphere. The fabricated FZP generates
illumination points with high contrast intensity in the focal plane,
which is the purpose of the wavefront sensor. This high-contrast image
suggests that the employed fabrication process is well controlled and it
matches the design parameters.
46.
de Rezende, Guilherme F M; Souza, Mario C M M; Frateschi, Newton C
Limitations of Coupled Mode Theory to Model Coupled Microresonators ``Dark States'' Proceedings Article
In: 2015 30TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO), Univ Fed Bahia; PET Engn Electrica; Sociedade Brasileira Computacao; Sociedade Brasileira Microelectronica; IEEE Solid State Circuits Soc; IEEE Elect Devices Soc; IFIP; CAPES; CNPq; SENAI CIMATEC IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2015, ISBN: 978-1-4673-7162-9, (30th Symposium on Microelectronics Technology and Devices (SBMicro), Salvador, BRAZIL, AUG 31-SEP 04, 2015).
@inproceedings{ISI:000378423000024,
title = {Limitations of Coupled Mode Theory to Model Coupled Microresonators
``Dark States''},
author = {Guilherme F M de Rezende and Mario C M M Souza and Newton C Frateschi},
isbn = {978-1-4673-7162-9},
year = {2015},
date = {2015-01-01},
booktitle = {2015 30TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO)},
publisher = {IEEE},
address = {345 E 47TH ST, NEW YORK, NY 10017 USA},
organization = {Univ Fed Bahia; PET Engn Electrica; Sociedade Brasileira Computacao;
Sociedade Brasileira Microelectronica; IEEE Solid State Circuits Soc;
IEEE Elect Devices Soc; IFIP; CAPES; CNPq; SENAI CIMATEC},
abstract = {In this work we present analytical and experimental results indicating
that Coupled Mode Theory, unlike the Transfer Matrix Method, may have
limitations in predicting the behavior of photonic molecules based on
embedded coupled microring cavities. We show that this resonant
mode-based approach fails to provide the correct transmission spectrum
for some important coupled cavity configurations, although correctly
predicting the existence of these modes as eigenstates of the coupled
system. The measured transmission spectrum of a CMOS compatible tunable
photonic molecule is used to demonstrate this limitation.},
note = {30th Symposium on Microelectronics Technology and Devices (SBMicro),
Salvador, BRAZIL, AUG 31-SEP 04, 2015},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
In this work we present analytical and experimental results indicating
that Coupled Mode Theory, unlike the Transfer Matrix Method, may have
limitations in predicting the behavior of photonic molecules based on
embedded coupled microring cavities. We show that this resonant
mode-based approach fails to provide the correct transmission spectrum
for some important coupled cavity configurations, although correctly
predicting the existence of these modes as eigenstates of the coupled
system. The measured transmission spectrum of a CMOS compatible tunable
photonic molecule is used to demonstrate this limitation.
that Coupled Mode Theory, unlike the Transfer Matrix Method, may have
limitations in predicting the behavior of photonic molecules based on
embedded coupled microring cavities. We show that this resonant
mode-based approach fails to provide the correct transmission spectrum
for some important coupled cavity configurations, although correctly
predicting the existence of these modes as eigenstates of the coupled
system. The measured transmission spectrum of a CMOS compatible tunable
photonic molecule is used to demonstrate this limitation.
47.
Souza, Mario C M M; Barea, Luis A M; von Zuben, Antonio A G; Wiederhecker, Gustavo S; Frateschi, Newton C
Tunable Spectral Engineering of Coupled Silicon Microcavities Proceedings Article
In: 2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2015, ISSN: 2160-9020, (Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, MAY 10-15, 2015).
@inproceedings{ISI:000370627101190,
title = {Tunable Spectral Engineering of Coupled Silicon Microcavities},
author = {Mario C M M Souza and Luis A M Barea and Antonio A G von Zuben and Gustavo S Wiederhecker and Newton C Frateschi},
issn = {2160-9020},
year = {2015},
date = {2015-01-01},
booktitle = {2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)},
publisher = {IEEE},
address = {345 E 47TH ST, NEW YORK, NY 10017 USA},
series = {Conference on Lasers and Electro-Optics},
abstract = {We demonstrate the generation and control of optical resonance
mode-splitting arising from a single-notch resonance using coupled
silicon microring resonators with electrically controlled
counter-propagating mode excitation. (C) 2014 Optical Society of America},
note = {Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, MAY 10-15,
2015},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
We demonstrate the generation and control of optical resonance
mode-splitting arising from a single-notch resonance using coupled
silicon microring resonators with electrically controlled
counter-propagating mode excitation. (C) 2014 Optical Society of America
mode-splitting arising from a single-notch resonance using coupled
silicon microring resonators with electrically controlled
counter-propagating mode excitation. (C) 2014 Optical Society of America
48.
Souza, M. C. M. M.; Barea, L. A. M.; Vallini, F.; Rezende, G. F. M.; Wiederhecker, G. S.; Frateschi, N. C.
Low-power four-channel wavelength multicasting in embedded microring resonators Conference
2014.
@conference{Souza2014,
title = {Low-power four-channel wavelength multicasting in embedded microring resonators},
author = {Souza, M.C.M.M. and Barea, L.A.M. and Vallini, F. and Rezende, G.F.M. and Wiederhecker, G.S. and Frateschi, N.C.},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84906872048&partnerID=40&md5=73603e4e63a74ea4e49bd3a060bd7e21},
year = {2014},
date = {2014-01-01},
journal = {Optics InfoBase Conference Papers},
abstract = {We demonstrate four-channel all-optical wavelength multicasting using only 1 mW of pump power and channel spacing of 40-60 GHz. Our device is based on a compact embedded microring design fabricated on a scalable SOI platform. copyright 2014 OSA.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We demonstrate four-channel all-optical wavelength multicasting using only 1 mW of pump power and channel spacing of 40-60 GHz. Our device is based on a compact embedded microring design fabricated on a scalable SOI platform. copyright 2014 OSA.
49.
Cirino, G. A. a; Montagnoli, A. N. a; Frateschi, N. C. b
Two-dimensional diffraction grating fabricated by maskless lithography Conference
2014.
@conference{Cirino2014,
title = {Two-dimensional diffraction grating fabricated by maskless lithography},
author = {Cirino, G.A.a and Montagnoli, A.N.a and Frateschi, N.C.b},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84912128126&partnerID=40&md5=fade1deb6521172cb5be18f44d35b1fc},
doi = {10.1109/SBMicro.2014.6940083},
year = {2014},
date = {2014-01-01},
journal = {2014 29th Symposium on Microelectronics Technology and Devices: Chip in Aracaju, SBMicro 2014},
abstract = {This work presents the fabrication of a two-dimensional diffraction grating with light phase modulation. The device was designed by employing the Iterative Fourier Transform Algorithm and fabricated by maskless direct laser writing system. Optical characterization of the diffraction pattern shown a good matching between the fabricated device and its design. copyright 2014 IEEE.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
This work presents the fabrication of a two-dimensional diffraction grating with light phase modulation. The device was designed by employing the Iterative Fourier Transform Algorithm and fabricated by maskless direct laser writing system. Optical characterization of the diffraction pattern shown a good matching between the fabricated device and its design. copyright 2014 IEEE.
50.
Jarschel, P. F.; Souza, M. C. M. M.; Von Zuben, A. A. G.; Ramos, A. C.; Merlo, R. B.; Frateschi, N. C.
Enabling III-V integrated photonics with Er-doped Al2O3 films Conference
2014.
@conference{Jarschel2014,
title = {Enabling III-V integrated photonics with Er-doped Al2O3 films},
author = {Jarschel, P.F. and Souza, M.C.M.M. and Von Zuben, A.A.G. and Ramos, A.C. and Merlo, R.B. and Frateschi, N.C.},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84912096021&partnerID=40&md5=cfb8c09774019dbd7acc424d7ad3b907},
doi = {10.1109/SBMicro.2014.6940104},
year = {2014},
date = {2014-01-01},
journal = {2014 29th Symposium on Microelectronics Technology and Devices: Chip in Aracaju, SBMicro 2014},
abstract = {We describe the integration of erbium-doped Al2O3 material with InGaAs/GaAs quantum well lasers emitting at 980 nm, demonstrating the possibility of integrating III-V based pumping lasers and materials suitable for optical amplification and planar photonics. Combining Er-doped materials with III-V compounds is challenging since ion activation usually requires high temperature annealing. In order to demonstrate the compatibility of the two material systems we fabricated laser samples using Er-doped Al2O3 films as insulating material. We compare annealed (800$,^circ$C) and non-annealed devices and show that laser performance is not affected by the high-temperature annealing. copyright 2014 IEEE.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We describe the integration of erbium-doped Al2O3 material with InGaAs/GaAs quantum well lasers emitting at 980 nm, demonstrating the possibility of integrating III-V based pumping lasers and materials suitable for optical amplification and planar photonics. Combining Er-doped materials with III-V compounds is challenging since ion activation usually requires high temperature annealing. In order to demonstrate the compatibility of the two material systems we fabricated laser samples using Er-doped Al2O3 films as insulating material. We compare annealed (800$,^circ$C) and non-annealed devices and show that laser performance is not affected by the high-temperature annealing. copyright 2014 IEEE.
51.
Barea, L. A. M.; Souza, M. C. M. M.; Rezende, G. F. M.; Frateschi, N. C.
Photonic molecules for optical signal processing Conference
2014.
@conference{Barea201454,
title = {Photonic molecules for optical signal processing},
author = {Barea, L.A.M. and Souza, M.C.M.M. and Rezende, G.F.M. and Frateschi, N.C.},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84921264357&partnerID=40&md5=6c350094daa70a36ecd4b5cb8f7fd069},
doi = {10.1109/IPCon.2014.6995206},
year = {2014},
date = {2014-01-01},
journal = {2014 IEEE Photonics Conference, IPC 2014},
pages = {54-55},
abstract = {We demonstrate how CMOS compatible photonic molecules (PM) can break the fundamental interdependence among quality factor (Q), channel spacing and size of microring resonators. Different PM architectures are presented for efficient and compact optical signal processing. copyright 2014 IEEE.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We demonstrate how CMOS compatible photonic molecules (PM) can break the fundamental interdependence among quality factor (Q), channel spacing and size of microring resonators. Different PM architectures are presented for efficient and compact optical signal processing. copyright 2014 IEEE.
52.
Shane, J. a; Gu, Q. a; Vallini, F. b; Wingad, B. a; Smalley, J. S. T. a; Frateschi, N. C. b; Fainman, Y. a
Thermal considerations in electrically-pumped metallo-dielectric nanolasers Conference
vol. 8980, 2014.
@conference{Shane2014,
title = {Thermal considerations in electrically-pumped metallo-dielectric nanolasers},
author = {Shane, J.a and Gu, Q.a and Vallini, F.b and Wingad, B.a and Smalley, J.S.T.a and Frateschi, N.C.b and Fainman, Y.a},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84901799111&partnerID=40&md5=9e0b7466f3ad94b8b41e631dc8381f18},
doi = {10.1117/12.2057412},
year = {2014},
date = {2014-01-01},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
volume = {8980},
abstract = {Metal nanocavity-based lasers show promise for dense integration in nanophotonic devices, thanks to their compact size and lack of crosstalk. Thermal considerations in these devices have been largely overlooked in design, despite the importance of self-heating and heat dissipation to device performance. We discuss the sources of self-heating in electrically-pumped wavelength-scale nanolasers, and the incorporation of these heat sources into a heat dissipation model to calculate laser operating temperature. We apply this thermal model to an example electrically-pumped nanolaser operating at room temperature. copyright 2014 SPIE.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
Metal nanocavity-based lasers show promise for dense integration in nanophotonic devices, thanks to their compact size and lack of crosstalk. Thermal considerations in these devices have been largely overlooked in design, despite the importance of self-heating and heat dissipation to device performance. We discuss the sources of self-heating in electrically-pumped wavelength-scale nanolasers, and the incorporation of these heat sources into a heat dissipation model to calculate laser operating temperature. We apply this thermal model to an example electrically-pumped nanolaser operating at room temperature. copyright 2014 SPIE.
53.
Souza, M. C. M. M.; Barea, L. A. M.; Vallini, F.; Rezende, G. F. M.; Wiederhecker, G. S.; Frateschi, N. C.
Embedded coupled microrings with high-finesse and close-spaced resonances for optical signal processing Journal Article
In: Optics Express, vol. 22, no. 9, pp. 10430-10438, 2014.
@article{Souza201410430,
title = {Embedded coupled microrings with high-finesse and close-spaced resonances for optical signal processing},
author = {Souza, M.C.M.M. and Barea, L.A.M. and Vallini, F. and Rezende, G.F.M. and Wiederhecker, G.S. and Frateschi, N.C.},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84899854737&partnerID=40&md5=7e75faaeebcfccc28776dcf2cc3635d9},
doi = {10.1364/OE.22.010430},
year = {2014},
date = {2014-01-01},
journal = {Optics Express},
volume = {22},
number = {9},
pages = {10430-10438},
abstract = {Single microring resonators have been used in applications such as wavelength multicasting and microwave photonics, but the dependence of the free spectral range with ring radius imposes a trade-off between the required GHz optical channel spacing, footprint and power consumption. We demonstrate four-channel all-optical wavelength multicasting using only 1 mW of control power, with converted channel spacing of 40-60 GHz. Our device is based on a compact embedded microring design fabricated on a scalable SOI platform. The coexistence of close resonance spacing and high finesse (205) in a compact footprint is possible due to enhanced quality factors (30,000) resulting from the embedded configuration and the coupling-strength dependence of resonance spacing, instead of ring size. In addition, we discuss the possibility of achieving continuously mode splitting from a single-notch resonance up to 40 GHz. copyright 2014 Optical Society of America.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Single microring resonators have been used in applications such as wavelength multicasting and microwave photonics, but the dependence of the free spectral range with ring radius imposes a trade-off between the required GHz optical channel spacing, footprint and power consumption. We demonstrate four-channel all-optical wavelength multicasting using only 1 mW of control power, with converted channel spacing of 40-60 GHz. Our device is based on a compact embedded microring design fabricated on a scalable SOI platform. The coexistence of close resonance spacing and high finesse (205) in a compact footprint is possible due to enhanced quality factors (30,000) resulting from the embedded configuration and the coupling-strength dependence of resonance spacing, instead of ring size. In addition, we discuss the possibility of achieving continuously mode splitting from a single-notch resonance up to 40 GHz. copyright 2014 Optical Society of America.
54.
Gu, Q. a; Shane, J. a; Vallini, F. a; Wingad, B. a; Smalley, J. S. T. a; Frateschi, N. C. b; Fainman, Y. a
Electrically pumped metallo-dielectric pedestal nanolasers with amorphous Al2O3 shield Conference
2014.
@conference{Gu2014,
title = {Electrically pumped metallo-dielectric pedestal nanolasers with amorphous Al2O3 shield},
author = {Gu, Q.a and Shane, J.a and Vallini, F.a and Wingad, B.a and Smalley, J.S.T.a and Frateschi, N.C.b and Fainman, Y.a},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84906074826&partnerID=40&md5=9ac0956ce95032736c698c849f049950},
year = {2014},
date = {2014-01-01},
journal = {Optics InfoBase Conference Papers},
abstract = {We implement amorphous-Al2O3 as a thermally-conductive shield in metallo-dielectric nanolasers, and demonstrate an electrically pumped device. Joint consideration of various design parameters reveals that this design allows the laser to dissipate heat through its shield. copyright 2014 OSA.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We implement amorphous-Al2O3 as a thermally-conductive shield in metallo-dielectric nanolasers, and demonstrate an electrically pumped device. Joint consideration of various design parameters reveals that this design allows the laser to dissipate heat through its shield. copyright 2014 OSA.
55.
A.R. Do Nascimento, Jr. a; Manera, L. T. a b; Diniz, J. A. a b; Silva, A. R. a; Dos Santos, M. V. P. d; S. Arismar Cerqueira, Jr. c; Barea, L. A. M. d; Frateschi, N. C. d
2014.
@conference{DoNascimento2014,
title = {Silicon nitride for nonlinear optics applications in the telecommunications C-band deposited by ECR-CVD},
author = {Do Nascimento, A.R., Jr.a and Manera, L.T.a b and Diniz, J.A.a b and Silva, A.R.a and Dos Santos, M.V.P.d and Arismar Cerqueira, S., Jr.c and Barea, L.A.M.d and Frateschi, N.C.d},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84912062536&partnerID=40&md5=4d1f68fa400e2b84d7b198819b63ad6b},
doi = {10.1109/SBMicro.2014.6940088},
year = {2014},
date = {2014-01-01},
journal = {2014 29th Symposium on Microelectronics Technology and Devices: Chip in Aracaju, SBMicro 2014},
abstract = {Silicon nitride films deposited by low-pressure electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-CVD) at room temperature are proposed for nonlinear optics applications in the telecommunications C-band. Numerical simulations were performed to determine the relationship between refractive index and the waveguide minimum size in order to have the zero dispersion point at 1.55 μm. Silicon nitride films with large thickness, low roughness and high refractive index were obtained by varying deposition parameters, such as gas pressure (4-6 mTorr) and Si/N ratio. The Si-rich silicon nitride film developed for nonlinear applications with refractive index of 2, high deposition rate, low hydrogen concentration and low roughness was used for fabrication of nonlinear microring resonators. Using the deposition process at low temperature, the stress limitation in thick silicon nitride films was eliminated. copyright 2014 IEEE.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
Silicon nitride films deposited by low-pressure electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-CVD) at room temperature are proposed for nonlinear optics applications in the telecommunications C-band. Numerical simulations were performed to determine the relationship between refractive index and the waveguide minimum size in order to have the zero dispersion point at 1.55 μm. Silicon nitride films with large thickness, low roughness and high refractive index were obtained by varying deposition parameters, such as gas pressure (4-6 mTorr) and Si/N ratio. The Si-rich silicon nitride film developed for nonlinear applications with refractive index of 2, high deposition rate, low hydrogen concentration and low roughness was used for fabrication of nonlinear microring resonators. Using the deposition process at low temperature, the stress limitation in thick silicon nitride films was eliminated. copyright 2014 IEEE.
56.
Gu, Q. a; Shane, J. a; Vallini, F. b; Wingad, B. a; Smalley, J. S. T. a; Frateschi, N. C. b; Fainman, Y. a
Amorphous Al2O3 shield for thermal management in electrically pumped metallo-dielectric nanolasers Journal Article
In: IEEE Journal of Quantum Electronics, vol. 50, no. 7, pp. 499-509, 2014.
@article{Gu2014499,
title = {Amorphous Al2O3 shield for thermal management in electrically pumped metallo-dielectric nanolasers},
author = {Gu, Q.a and Shane, J.a and Vallini, F.b and Wingad, B.a and Smalley, J.S.T.a and Frateschi, N.C.b and Fainman, Y.a},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84901332397&partnerID=40&md5=60c6d9b35f5a951fecb6ca959ac73556},
doi = {10.1109/JQE.2014.2321746},
year = {2014},
date = {2014-01-01},
journal = {IEEE Journal of Quantum Electronics},
volume = {50},
number = {7},
pages = {499-509},
abstract = {We analyze amorphous Al2O3 (α-Al 2O3) for use as a thick thermally conductive shield in metallo-dielectric semiconductor nanolasers, and show that the use of (alpha ) -Al2O3 allows a laser to efficiently dissipate heat through its shield. This new mechanism for thermal management leads to a significantly lower operating temperature within the laser, compared with lasers with less thermally conductive shields, such as SiO2. We implement the shield in a continuous wave electrically pumped cavity, and analyze its experimental performance by jointly investigating its optical, electrical, thermal, and material gain properties. Our analysis shows that the primary obstacle to room temperature lasing was the device's high threshold gain. At the high pump levels required to achieve the gain threshold, particularly at room temperature, the gain spectrum broadened and shifted, leading to detrimental mode competition. Further simulations predict that an increase in the pedestal undercut depth should enable room temperature lasing in a device with the same footprint and gain volume. Through the integrated treatment of various physical effects, this analysis shows the promise of (α-Al2O3 for nanolaser thermal management, and enables better understanding of nanolaser behavior, as well as more informed design of reliable nanolasers. copyright 2014 IEEE.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
We analyze amorphous Al2O3 (α-Al 2O3) for use as a thick thermally conductive shield in metallo-dielectric semiconductor nanolasers, and show that the use of (alpha ) -Al2O3 allows a laser to efficiently dissipate heat through its shield. This new mechanism for thermal management leads to a significantly lower operating temperature within the laser, compared with lasers with less thermally conductive shields, such as SiO2. We implement the shield in a continuous wave electrically pumped cavity, and analyze its experimental performance by jointly investigating its optical, electrical, thermal, and material gain properties. Our analysis shows that the primary obstacle to room temperature lasing was the device's high threshold gain. At the high pump levels required to achieve the gain threshold, particularly at room temperature, the gain spectrum broadened and shifted, leading to detrimental mode competition. Further simulations predict that an increase in the pedestal undercut depth should enable room temperature lasing in a device with the same footprint and gain volume. Through the integrated treatment of various physical effects, this analysis shows the promise of (α-Al2O3 for nanolaser thermal management, and enables better understanding of nanolaser behavior, as well as more informed design of reliable nanolasers. copyright 2014 IEEE.
57.
Espinel, Y. A. V.; Alegre, T. P. M.; Wiederhecker, G. S.
Brillouin scattering in silicon slotwaveguides Conference
2014.
@conference{Espinel2014,
title = {Brillouin scattering in silicon slotwaveguides},
author = {Espinel, Y.A.V. and Alegre, T.P.M. and Wiederhecker, G.S.},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84905403460&partnerID=40&md5=b173e0b15e13104d088736fdaebbdd21},
year = {2014},
date = {2014-01-01},
journal = {Optics InfoBase Conference Papers},
abstract = {Here we numerically investigate Brillouin scattering (BS) in a silicon slot waveguide. We show that BS is strongly influenced by the boundary effects, instead of the usual photo-elastic effect leading to the interaction with distinct mechanical modes. copyright 2014 Optical Society of America.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
Here we numerically investigate Brillouin scattering (BS) in a silicon slot waveguide. We show that BS is strongly influenced by the boundary effects, instead of the usual photo-elastic effect leading to the interaction with distinct mechanical modes. copyright 2014 Optical Society of America.
58.
Zhang, M. a; Luiz, G. b; Shah, S. a; Wiederhecker, G. b; Lipson, M. a c
Eliminating anchor loss in optomechanical resonators using elastic wave interference Journal Article
In: Applied Physics Letters, vol. 105, no. 5, 2014.
@article{Zhang2014,
title = {Eliminating anchor loss in optomechanical resonators using elastic wave interference},
author = {Zhang, M.a and Luiz, G.b and Shah, S.a and Wiederhecker, G.b and Lipson, M.a c},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84905671257&partnerID=40&md5=548b8970d7257673a286f6684b0406c3},
doi = {10.1063/1.4892417},
year = {2014},
date = {2014-01-01},
journal = {Applied Physics Letters},
volume = {105},
number = {5},
abstract = {Optomechanical resonators suffer from the dissipation of mechanical energy through the necessary anchors enabling the suspension of the structure. Here, we show that such structural loss in an optomechanical oscillator can be almost completely eliminated through the destructive interference of elastic waves using dual-disk structures. We also present both analytical and numerical models that predict the observed interference of elastic waves. Our experimental data reveal unstressed silicon nitride (Si3N4) devices with mechanical Q-factors up to 104 at mechanical frequencies of f=102 MHz (fQ=1012) at room temperature. copyright 2014 AIP Publishing LLC.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Optomechanical resonators suffer from the dissipation of mechanical energy through the necessary anchors enabling the suspension of the structure. Here, we show that such structural loss in an optomechanical oscillator can be almost completely eliminated through the destructive interference of elastic waves using dual-disk structures. We also present both analytical and numerical models that predict the observed interference of elastic waves. Our experimental data reveal unstressed silicon nitride (Si3N4) devices with mechanical Q-factors up to 104 at mechanical frequencies of f=102 MHz (fQ=1012) at room temperature. copyright 2014 AIP Publishing LLC.
59.
Gu, Q. a; Shane, J. a; Vallini, F. a; Smalley, J. S. T. a; Frateschi, N. C. b; Fainman, Y. a
Electrically pumped metallo-dielectric pedestal nanolasers with high thermal-conductivity shield Conference
2014.
@conference{Gu2014524,
title = {Electrically pumped metallo-dielectric pedestal nanolasers with high thermal-conductivity shield},
author = {Gu, Q.a and Shane, J.a and Vallini, F.a and Smalley, J.S.T.a and Frateschi, N.C.b and Fainman, Y.a},
url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84921321816&partnerID=40&md5=7efb38116d9ae8d624852aae53c7f6af},
doi = {10.1109/IPCon.2014.6995481},
year = {2014},
date = {2014-01-01},
journal = {2014 IEEE Photonics Conference, IPC 2014},
pages = {524-525},
abstract = {We implement amorphous-Al2O3 as thermally-conductive shield in metallo-dielectric nanolasers, and demonstrate an electrically pumped device. Joint consideration of various design parameters reveals that this design allows the laser to dissipate heat through its shield, aiding thermal management in nanoscale devices. copyright 2014 IEEE.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We implement amorphous-Al2O3 as thermally-conductive shield in metallo-dielectric nanolasers, and demonstrate an electrically pumped device. Joint consideration of various design parameters reveals that this design allows the laser to dissipate heat through its shield, aiding thermal management in nanoscale devices. copyright 2014 IEEE.
60.
Espinel, Yovanny A V; Alegre, Thiago P M; Wiederhecker, Gustavo S
Brillouin Scattering in Silicon Slot Waveguides Proceedings Article
In: 2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2014, ISSN: 2160-9020, (Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, JUN 08-13, 2014).
@inproceedings{ISI:000369908601475,
title = {Brillouin Scattering in Silicon Slot Waveguides},
author = {Yovanny A V Espinel and Thiago P M Alegre and Gustavo S Wiederhecker},
issn = {2160-9020},
year = {2014},
date = {2014-01-01},
booktitle = {2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)},
publisher = {IEEE},
address = {345 E 47TH ST, NEW YORK, NY 10017 USA},
series = {Conference on Lasers and Electro-Optics},
abstract = {Here we numerically investigate Brillouin scattering (BS) in a silicon
slot waveguide. We show that BS is strongly influenced by the boundary
effects, instead of the usual photo-elastic effect leading to the
interaction with distinct mechanical modes. (C) 2014 Optical Society of
America},
note = {Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, JUN 08-13,
2014},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Here we numerically investigate Brillouin scattering (BS) in a silicon
slot waveguide. We show that BS is strongly influenced by the boundary
effects, instead of the usual photo-elastic effect leading to the
interaction with distinct mechanical modes. (C) 2014 Optical Society of
America
slot waveguide. We show that BS is strongly influenced by the boundary
effects, instead of the usual photo-elastic effect leading to the
interaction with distinct mechanical modes. (C) 2014 Optical Society of
America
2010
Journal Articles
Mialichi, J. R.; Frateschi, N. C.
In: Journal of Crystal Growth, vol. 312, no. 15, pp. 2279–2283, 2010, ISSN: 0022-0248.
@article{mialichi_shorter_2010,
title = {Shorter wavelength emission with InAs quantum dots growth directly on large bandgap quaternary (In0.68Ga0.32As0.7P0.3) barriers for high current injection efficiency},
author = {Mialichi, J. R. and Frateschi, N. C.},
url = {http://www.sciencedirect.com/science/article/pii/S0022024810003003},
issn = {0022-0248},
year = {2010},
date = {2010-01-01},
urldate = {2014-05-14},
journal = {Journal of Crystal Growth},
volume = {312},
number = {15},
pages = {2279--2283},
abstract = {We present the growth of stacked layers of InAs quantum dots directly on high bandgap In0.68Ga0.32As0.7P0.3 (λg=1420 nm) barriers. The quaternary material is lattice matched to InP forming a double hetero-structure. Indium flux, number of InAs stacked layers and InGaAsP inner separation layer thickness were investigated. Photoluminescence (PL) and atomic force microscopy (AFM) analysis indicate the occurrence of gallium diffusion and the arsenic/phosphorus (As/P) exchange with the InGaAsP barriers. As a result, shorter wavelength emission is observed, making the structures suitable for telecom applications.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
We present the growth of stacked layers of InAs quantum dots directly on high bandgap In0.68Ga0.32As0.7P0.3 (λg=1420 nm) barriers. The quaternary material is lattice matched to InP forming a double hetero-structure. Indium flux, number of InAs stacked layers and InGaAsP inner separation layer thickness were investigated. Photoluminescence (PL) and atomic force microscopy (AFM) analysis indicate the occurrence of gallium diffusion and the arsenic/phosphorus (As/P) exchange with the InGaAsP barriers. As a result, shorter wavelength emission is observed, making the structures suitable for telecom applications.
Conferences
Safavi-Naeini, A. H.; Mayer Alegre, T. P.; Painter, O. J.
Efficient on-chip phonon-photon translation Conference
2010 Conference on Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010.
@conference{safavi-naeini_efficient_2010,
title = {Efficient on-chip phonon-photon translation},
author = {Safavi-Naeini, A.H. and Mayer Alegre, T.P. and Painter, O.J.},
url = {https://sites.ifi.unicamp.br/lpd/files/2014/10/Safavi-Naeini-et-al.-2010-Efficient-on-chip-phonon-photon-translation.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {2010 Conference on Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS)},
pages = {1--2},
abstract = {We propose, analyze, design, and take the first experimental steps towards the demonstration of an on-chip device capable of converting photons to phonons, and vice versa, in a nearly quantum-limited setting.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We propose, analyze, design, and take the first experimental steps towards the demonstration of an on-chip device capable of converting photons to phonons, and vice versa, in a nearly quantum-limited setting.
Valine, Felipe; Zuben, Ant^onio A.; Frateschi, Newton C.
Multi-Segmented Semiconductor Optical Amplifier for Optical Saturation Control Conference
Latin America Optics and Photonics Conference, OSA Technical Digest (CD) Optical Society of America, 2010.
@conference{valine_multi-segmented_2010,
title = {Multi-Segmented Semiconductor Optical Amplifier for Optical Saturation Control},
author = {Valine, Felipe and Zuben, Ant{^o}nio A. and Frateschi, Newton C.},
url = {http://www.opticsinfobase.org/abstract.cfm?URI=LAOP-2010-ThB2},
year = {2010},
date = {2010-01-01},
urldate = {2014-05-14},
booktitle = {Latin America Optics and Photonics Conference},
pages = {ThB2},
publisher = {Optical Society of America},
series = {OSA Technical Digest (CD)},
abstract = {We fabricated multi-contacts tilted semiconductor amplifiers based on InGaAsP/InP quantum wells for external control of the optical power saturation. A linearity control of the amplification for DC signals was achieved for relatively low injection current},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
We fabricated multi-contacts tilted semiconductor amplifiers based on InGaAsP/InP quantum wells for external control of the optical power saturation. A linearity control of the amplification for DC signals was achieved for relatively low injection current
Perahia, R.; Alegre, T. P. M.; Cohen, J. D.; Painter, O.
Towards on-chip tunable nanolasers based on optomechanical zipper cavities Conference
2010 Conference on Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010.
@conference{perahia_towards_2010,
title = {Towards on-chip tunable nanolasers based on optomechanical zipper cavities},
author = {Perahia, R. and Alegre, T.P.M. and Cohen, J.D. and Painter, O.},
url = {https://sites.ifi.unicamp.br/lpd/files/2014/10/Perahia-et-al.-2010-Towards-on-chip-tunable-nanolasers-based-on-optome.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {2010 Conference on Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS)},
pages = {1--2},
abstract = {Work towards semiconductor nanolasers at λ = 1.3 µm in optomechanically coupled one dimensional photonic-crystal cavities is presented. Optical mode spectroscopy and on-chip tuning capability based on capacitive actuation is developed. Experimental and theoretical results are presented.},
keywords = {},
pubstate = {published},
tppubtype = {conference}
}
Work towards semiconductor nanolasers at λ = 1.3 µm in optomechanically coupled one dimensional photonic-crystal cavities is presented. Optical mode spectroscopy and on-chip tuning capability based on capacitive actuation is developed. Experimental and theoretical results are presented.
Book Sections
Barea, L. a. M.; Vallini, F.; Figueira, D. L. S.; Da Silva Filho, A.; Frateschi, N. C.; Vaz, A. R.
Si3N4/SiO2 Planar Photonic Structures Fabricated by Focused Ion Beam Book Section
In: Luryi, Serge; Xu, Jimmy; Zaslavsky, Alex (Ed.): Future Trends in Microelectronics, pp. 97–104, John Wiley & Sons, Inc., 2010, ISBN: 9780470649343.
@incollection{barea_si3n4/sio2_2010,
title = {Si3N4/SiO2 Planar Photonic Structures Fabricated by Focused Ion Beam},
author = {Barea, L. a. M. and Vallini, F. and Figueira, D. L. S. and Da Silva Filho, A. and Frateschi, N. C. and Vaz, A. R.},
editor = {Luryi, Serge and Xu, Jimmy and Zaslavsky, Alex},
url = {http://onlinelibrary.wiley.com/doi/10.1002/9780470649343.ch8/summary},
isbn = {9780470649343},
year = {2010},
date = {2010-01-01},
urldate = {2014-05-14},
booktitle = {Future Trends in Microelectronics},
pages = {97--104},
publisher = {John Wiley & Sons, Inc.},
abstract = {This chapter contains sections titled: * Introduction * Fabrication and characterization * Conclusions},
keywords = {},
pubstate = {published},
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This chapter contains sections titled: * Introduction * Fabrication and characterization * Conclusions
Copyright Notices
AIP: Copyright© (2006-2011) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. APS: The right, after publication by APS, to use all or part of the Article without revision or modification, including the APS-formatted version, in print compilations or other print publications of the author(s)’ and/or the employer’s own works, and on the author(s)’ and/or the employer’s web home page, and to make copies of all or part of the Article for the author(s)’ and/or the employer’s use for lecture or classroom purposes. OSA: The right, after publication by OSA, to use all or part of the Work without revision or modification, including the OSA-formatted version, in personal compilations or other publications consisting solely of the Author(s’) own works, including the Author(s’) personal web home page, and to make copies of all or part of the Work for the Author(s’) use for lecture or classroom purposes.