A method to fabricate GaAs microcavities using only a soft mask with an electrolithographic pattern in an inductively coupled plasma etching is presented. A careful characterization of the fabrication process pinpointing the main routes for a smooth device sidewall is discussed. Using the final recipe, optomechanical microdisk resonators are fabricated. The results show very high optical quality factors of Qopt > 2 × 105, among the largest already reported for dry-etching devices. The final devices are also shown to present high mechanical quality factors and an optomechanical vacuum coupling constant of g0 = 2π × 13.6 kHz enabling self-sustainable mechanical oscillations for an optical input power above 1 mW.
Brillouin optomechanics in nanophotonic structure
We are happy to announce our recent grant applications were approved by FAPESP! These grants should ensure solid funding for the next several years. Soon we will announce available positions!
- Non-Classical States of Light on Chips: FAPESP Young Researcher Award – PI Felippe Barbosa
- Nonlinear nanophotonics circuits: building blocks for optical frequency synthesis, filtering and signal processing : FAPESP Young Researcher Award 2 – PI Gustavo Wiederhecker;
- Optomechanical Cavities Towards Single Photon Strong Coupling: FAPESP Young Researcher Award 2 – PI Thiago Alegre;
From left to right:
Newton F., Antônio V., Natalia C., Felippe B., Michäel M., Gustavo W., Pierre A., Marvyn I., André P., Cauê M., Caíque R., Ana Luisa, Pedro P., André M., Gustavo P., Roberto Z., Rodrigo B., Yovanny V., Carol V., David B., Thiago A.